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A NOVEL METAMATERIAL MICROFLUIDIC SENEOR FORBIOCHEMICAL SENSING
1, 2, 3 , 1, 2, 3 , 1, 2, 3 , 1, 2, 3 , * 1, 2, 3 , 1, 2, 3 , 4 , 1, 2, 3
1  Defense Key Disciplines Lab of Novel Micro-nano Devices and System Technology,Chongqing University, Chongqing, China
2  International R & D center of Micro-nano Systems and New Materials Technology,Chongqing University, Chongqing, China
3  Key Laboratory of Optoelectronic Technology & Systems, Ministry of Education, Chongqing University, Chongqing, China
4  Institute of High Performance Computing, Agency for Science, Technology and Research, Singapore

Abstract:

This paper presents a novel metamaterial micro-fluidic sensor with two pairs of symmetrical double split-ring resonators (DSRR) compared to state of the art, which exhibits unique high-Q (~653) resonance and a 34% higher S21 magnitude than a single DSRR and allow, for the first time, real-time dual-channel biochemical testing through the design of two micro channels underneath the metamaterial DSRR. Polyimide was chosen as the substrate material and it shows good temperature stability at -200~300 °C, which makes the sensor enabling to work in harsh environment.

Keywords: metamaterial, sensor, micro-fluidics, biochemical sensing, chemical analysis
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