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Prof. Ulrich Schmid

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Institute of Sensor and Actuat...

0000-0003-4528-8653

The user biography is not available.

Research Keywords & Expertise

Material Characterizat...

PiezoMEMS

MEMS (e.g. sensors, ac...

SiCMEMS

MEMS materials (e.g. S...

Micro-and nanomachinin...

NEMS (e.g. sensors, ac...

Packaging aspects

Co-authors
128
Andreas Dietzel
Institute of Microtechnology...
Annette Foelske
Vienna University of Technol...
Chun-Yi Chen
Daisuke Yamane
Department of Mechanical Eng...
David Ruiz Gracia
Departamento de Matemáticas,...
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