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Sub-surface Thermal Imaging of Microelectronic Devices using Confocal Laser Scanning Thermoreflectance Microscopy
Dong Uk Kim, Chan Bae Jeong, Jung Dae Kim, Ki Soo Chang
Division of Scientific Instrumentation, Korea Basic Science Institute, 169-148 Gwahak-ro, Yuseong-gu, Daejeon, 34133, South Korea

Published: 01 January 2018 by The Optical Society in Imaging and Applied Optics 2018 (3D, AO, AIO, COSI, DH, IS, LACSEA, LS&C, MATH, pcAOP)
The Optical Society, 10.1364/3d.2018.jm4a.16
Keywords: thermal imaging
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