Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics
Published: 10 May 2017 by MDPI in Sensors
MDPI, Volume 17; 10.3390/s17051080
Abstract: The response to different force load ranges and actuation at low energies is of considerable interest for applications of compliant and flexible devices undergoing large deformations. We present a review of technological platforms based on nitride materials (aluminum nitride and silicon nitride) for the microfabrication of a class of flexible micro-electro-mechanical systems. The approach exploits the material stress differences among the constituent layers of nitride-based (AlN/Mo, SixNy/Si and AlN/polyimide) mechanical elements in order to create microstructures, such as upwardly-bent cantilever beams and bowed circular membranes. Piezoresistive properties of nichrome strain gauges and direct piezoelectric properties of aluminum nitride can be exploited for mechanical strain/stress detection. Applications in flow and tactile sensing for robotics are described.
Keywords: MEMS, Stress-driven, aluminum nitride, silicon nitride, piezoelectric, Piezoresistive, tactile sensing, Flow Sensing