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Flexible Piezoelectric Energy-Harvesting Exploiting Biocompatible AlN Thin Films Grown onto Spin-Coated Polyimide Layers
Luciana Algieri, 1 Maria Teresa Todaro, 1 Francesco Guido, 1 Vincenzo Mastronardi, 1 Denis Desmaële, 1 Antonio Qualtieri, 1 Cinzia Giannini, 2 Teresa Sibillano, 2 Massimo De Vittorio 1
1  Istituto Italiano di Tecnologia (IIT), Center for Biomolecular Nanotechnologies, Via Barsanti, 73010 Arnesano, Italy
2  Istituto di Cristallografia, Consiglio Nazionale delle Ricerche, v. Amendola 122/O, 70126 Bari, Italy

Published: 03 October 2018 by American Chemical Society (ACS) in ACS Applied Energy Materials
American Chemical Society (ACS), 10.1021/acsaem.8b00820
Keywords: flexible, fabrication, energy harvester, Conformability, Spin Coated, Thicknesses, Piezoelectric Aln
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