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Alternative architecture for highly performing AlN vibrational energy harvester
F. Guido, M. T. Todaro, A. Qualtieri, G. Epifani, C. Maruccio, L. Algieri, M. De Vittorio

Published: 01 July 2017 by Institute of Electrical and Electronics Engineers (IEEE) in 2017 IEEE 17th International Conference on Nanotechnology (IEEE-NANO)
Institute of Electrical and Electronics Engineers (IEEE), 10.1109/nano.2017.8117410
Keywords: architecture, structure, standard, Beam, AlN, Matrix, backside, optimal, harvester, holes
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