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A Si FET-type Gas Sensor with Pulse-driven Localized Micro-heater for Low Power Consumption
Yoonki Hong, 1 Seongbin Hong, 1 Dongkyu Jang, 1 Yujeong Jeong, 1 Meile Wu, 1 Gyuweon Jung, 1 Jong-Ho Bae, 1 Jun Shik Kim, 1 Ki Soo Chang, 2 Chan Bae Jeong, 2 Cheol Seong Hwang, 1 Byung-Gook Park, 1 Jong-Ho Lee 1
1  MSE, ISRC, Seoul National University, School of ECE, Seoul, 08826, Korea
2  Division of Scientific Instrumentation, Korea Basic Science Institute, School of ECE, Daejeon, 34133, Korea

Published: 01 December 2018 by Institute of Electrical and Electronics Engineers (IEEE) in 2018 IEEE International Electron Devices Meeting (IEDM)
Institute of Electrical and Electronics Engineers (IEEE), 10.1109/iedm.2018.8614562
Keywords: silicon, Transient analysis, temperature sensors, gas detectors, temperature measurement, heating systems
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