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3D IC/Stacked Device Fault Isolation using Lock-in Infrared Microscopy
Hwan Hur, Kye-Sung Lee
Division of Scientific Instrumentation, Korea Basic Science Institute, 169-148 Gwahak-ro, Yuseong-gu, Daejeon, Republic of Korea 34133

Published: 01 January 2018 by The Optical Society in Imaging and Applied Optics 2018 (3D, AO, AIO, COSI, DH, IS, LACSEA, LS&C, MATH, pcAOP)
The Optical Society, 10.1364/3d.2018.jtu4a.30
Keywords: Infrared Microscopy, Three Dimensional Microscopy
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