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Image reversal reactive immersion lithography improves the detection limit of focal molography
Andreas Frutiger, 1 Cla Duri Tschannen, 1 Yves Blickenstorfer, 1 Andreas M. Reichmuth, 1 Christof Fattinger 2 , Janos Vörös 1
1  Laboratory of Biosensors and Bioelectronics, Institute of Biomedical Engineering, ETH Zürich, 8092 Zürich, Switzerland
2  Roche Pharma Research and Early Development, Roche Innovation Center Basel, 4070 Basel, Switzerland

Published: 26 November 2018 by The Optical Society in Optics Letters
The Optical Society, Volume 43; 10.1364/ol.43.005801
Keywords: refractive index, phase shift, Laser Scattering, immersion lithography, Destructive Interference, Constructive Interference
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