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Robust Fabrication Method for Silicon Nanowire Field Effect Transistors for Sensing Applications
Marleen Mescher, Louis C. P. M. De Smet, Ernst J. R. Sudhölter, Johan H. Klootwijk

Published: 01 August 2013 by American Scientific Publishers in Journal of Nanoscience and Nanotechnology
American Scientific Publishers, Volume 13; 10.1166/jnn.2013.7548
Keywords: silicon nanowire, field effect transistors, Robust Fabrication, Nanowire field, Sensing Applications
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