Please login first
William M. Megill  - - - 
Top co-authors See all
Francesco Rizzi

45 shared publications

Center for Bio-Molecular [email protected], Istituto Italiano di Tecnologia, Via Eugenio Barsanti 14, 73010 Arnesano (LE), Italy.

Antonio Qualtieri

17 shared publications

Center for Bio-Molecular [email protected], Istituto Italiano di Tecnologia, Via Eugenio Barsanti 14, 73010 Arnesano (LE), Italy.

Francesco Guido

9 shared publications

Istituto Italiano di Tecnologia (IIT), Center for Biomolecular Nanotechnologies, Via Barsanti, 73010 Arnesano, Italy

Tommaso Dattoma

6 shared publications

Center for Biomolecular Nanotechnologies @UNILE, Istituto Italiano di Tecnologia (IIT), Arnesano (LE) 73010, Italy;(C.A.);(V.M.M.);(F.G.);(T.D.);(A.Q.)

Claudio Abels

4 shared publications

Center for Biomolecular Nanotechnologies @UNILE, Istituto Italiano di Tecnologia, Arnesano (LE), I-73010, Italy

3
Publications
0
Reads
0
Downloads
7
Citations
Publication Record
Distribution of Articles published per year 
(2013 - 2017)
Total number of journals
published in
 
3
 
Publications
Article 4 Reads 3 Citations Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics Claudio Abels, Vincenzo Mariano Mastronardi, Francesco Guido... Published: 10 May 2017
Sensors, doi: 10.3390/s17051080
DOI See at publisher website PubMed View at PubMed ABS Show/hide abstract
The response to different force load ranges and actuation at low energies is of considerable interest for applications of compliant and flexible devices undergoing large deformations. We present a review of technological platforms based on nitride materials (aluminum nitride and silicon nitride) for the microfabrication of a class of flexible micro-electro-mechanical systems. The approach exploits the material stress differences among the constituent layers of nitride-based (AlN/Mo, SixNy/Si and AlN/polyimide) mechanical elements in order to create microstructures, such as upwardly-bent cantilever beams and bowed circular membranes. Piezoresistive properties of nichrome strain gauges and direct piezoelectric properties of aluminum nitride can be exploited for mechanical strain/stress detection. Applications in flow and tactile sensing for robotics are described.
BOOK-CHAPTER 0 Reads 0 Citations Stress-Driven Artificial Hair Cell for Flow Sensing Francesco Rizzi, Antonio Qualtieri, Lily D. Chambers, Gianmi... Published: 23 January 2014
Flow Sensing in Air and Water, doi: 10.1007/978-3-642-41446-6_19
DOI See at publisher website
Article 0 Reads 4 Citations Parylene conformal coating encapsulation as a method for advanced tuning of mechanical properties of an artificial hair ... Antonio Qualtieri, Lily D. Chambers, William M. Megill, Fran... Published: 01 January 2013
Soft Matter, doi: 10.1039/c2sm27566j
DOI See at publisher website
Top