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Prof. Zhenchuan YANG

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Peking University

+1

Peking University

The user biography is not available.

Research Keywords & Expertise

A

Accelerometer

MEMS

Microfabrication

Nanofabrication

NEMS

Pressure

Sensors

SOI

Temperature

Fingerprints

A

MEMS

Sensors

Temperature

Accelerometer

Pressure

SOI

Co-authors
47
Huikai Xie
Beijin Institute of Technolo...
Michael Kraft
ESAT- MICAS, Microelectronic...
Wangnan Chen
Baoshun Zhang
Chengchen Gao
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