Conventional surface-enhanced Raman scattering (SERS) has a poor surface reproducibility, which led to measurement repeatability becoming unreliable, therefore, it is not suitable for quantitative analysis. With the rapid development of nanotechnology in recent years, highly ordered and controllable SERS substrates have been realised, so as to ensure the accuracy of measurements, and SERS signal enhancement factor has also greatly increased.  In this research we have undertaken two step innovative research on Nano structured arrays for Raman signal enhancement; and channel waveguide evanescent field emission Raman signal, followed by further exploring and developing in to a high-sensitivity integrated optical SERS sensing device with practical value, which can be used in the fields of detecting contaminants, medical diagnostics, gene research and rapid identification applications.