Events8th International Symposium on Sensor Science
Published
with-doi10.3390/I3S2021Dresden-10086 (registering DOI)
This submission belongs to the session S3. Physical Sensors of the event 8th International Symposium on Sensor Science
Published date
17 May, 2021
Citation
Ingo Tobehn-Steinhäuser, Manfred Reiche, Matthias​ Schmelz, Ronny​ Stolz, Thomas Fröhlich, Thomas Ortlepp, Carrier mobility in semiconductors at very low temperatures, in Proceedings of 8th International Symposium on Sensor Science, 17 May–28 May 2021, MDPI: Basel, Switzerland, doi: 10.3390/I3S2021Dresden-10086
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Carrier mobility in semiconductors at very low temperatures

Manfred Reiche 2
Matthias​ Schmelz 3
Thomas Ortlepp 2
1. CIS Forschungsinstitut für Mikrosensorik GmbH, Konrad-Zuse-Str. 14, D-99099 Erfurt, Germany, Germany
2. CIS Forschungsinstitut für Mikrosensorik GmbH, Konrad-Zuse-Str. 14, D-99099 Erfurt, Germany
3. Leibniz-Institut für Photonische Technologien, Albert-Einstein-Str. 9, D-07745 Jena, Germany
4. Technische Universität Ilmenau, Institut für Prozessmess- und Sensortechnik, Ehrenbergstr. 29, D-98693 Ilmenau, Germany
Abstract

Carrier mobilities and concentrations were measured for different p- and n-type silicon materials in the temperature range 0.3–300 K. Simulations show that experimentally determined carrier mobilities are best described in this temperature range by Klaassen´s model. Freeze out reduce the carrier concentration with decreasing temperature. Freeze out, however, depends on the dopant type and initial concentration. Semi-classical calculations are useful only for temperatures above 100 K. Otherwise quantum mechanical calculations are required.

Keywords
silicon
carrier mobility
carrier concentration
low-temperature measurements
Manuscript
Poster
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