Numerical Simulation Analysis of a Capacitive Pressure Sensor for Wearable Medical Devices

Wearable sensor devices are becoming increasingly important in medical applications due to their high sensitivity and compact size, with flexible elastomer materials playing a crucial role in their functionality. This research focuses on developing a capacitive pressure sensor (CPS) using Multiphysics software to explore its potential for medical use. The CPS is designed with a cylindrical structure, utilizing air as the dielectric medium between a polysilicon base and a polydimethylsiloxane (PDMS) diaphragm. Simulation results indicate that at a pressure of 1 kPa, the CPS achieves a capacitance of 1.28 pF and stores 0.644 pJ of electrical energy. Moreover, the sensitivity of the sensor improves as the pressure increases, with analytical results showing strong agreement with numerical analyses. These findings highlight that the CPS can effectively store electrical energy and respond accurately to pressure variations, which is essential for reliable performance in medical applications. The promising results from the simulations suggest that the CPS could be a viable option for integration into wearable medical devices, potentially improving patient monitoring and diagnostics. Future work will involve fabricating the sensor and conducting experimental tests to validate the simulation results. This step is critical to ensure that the sensor performs as expected in real-world conditions and meets the stringent requirements of medical applications. This research underscores the potential of the CPS in the realm of wearable medical devices, highlighting its promise for contributing significantly to patient care and diagnostics.