EventsThe 11th International Electronic Conference on Sensors and Applications
Event submissions
Published
with-doi10.3390/ecsa-11-20495
This submission belongs to the session S2. Physical Sensors of the event The 11th International Electronic Conference on Sensors and Applications
Published date
26 Nov, 2024
Academic Editor
author-avatarJean-marc Laheurte
Citation
Basit Abdul, Abdul Qadeer, Abdul Rab Asary, Development of a novel MEMS gas flowmeter with a temperature difference suspension structure, in Proceedings of The 11th International Electronic Conference on Sensors and Applications, 26 November–28 November 2024, MDPI: Basel, Switzerland, doi: 10.3390/ecsa-11-20495
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Development of a novel MEMS gas flowmeter with a temperature difference suspension structure

Basit Abdul 1
Abdul Qadeer 2
Abdul Rab Asary 3
1. University of Sherbrooke, Canada 2500 Bd de l'Université, Sherbrooke, QC J1K 2R1, Canada
2. Academy of Medical Science, Zhengzhou University 100 Kexue Blvd, Zhongyuan District, Zhengzhou, 450001, Henan, China,
3. Laboratoire d’Ingénierie des Fluides et des Systèmes Énergétiques - LIFSE, Arts et Métiers Institute of Technology Paris, 151 boulevard de l'Hôpital, 75013 Paris, France
Abstract
Keywords
Micro Flowmeter
MEMS
Thermal Resistor Suspended Structure
Weak Signal Acquisition
High Resolution ADC
Manuscript
engproc-sciforum_101580_S2.pdf