EventsInternational Electronic Conference on Sensors and Applications
Event submissions
Published
with-doi10.3390/ecsa-1-e006
This submission belongs to the session e. MEMS and NEMS of the event International Electronic Conference on Sensors and Applications
Published date
02 Jun, 2014
Citation
Mohamad Halim Abd Wahid, Shazlina Johari, Mohd Najmi Mat Noh, Ahmad Fitri Anuar Mahayudin, zulhilmi zainol, MEMS Parallel Plate Beam Actuator: Correlation Study of Pull-In Voltage and Dielectric Layer Beyond 1µm Displacement, in Proceedings of International Electronic Conference on Sensors and Applications, 1 June–16 June 2014, MDPI: Basel, Switzerland, doi: 10.3390/ecsa-1-e006
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MEMS Parallel Plate Beam Actuator: Correlation Study of Pull-In Voltage and Dielectric Layer Beyond 1µm Displacement

Mohd Najmi Mat Noh 1
Mohamad Halim Abd Wahid 1
Shazlina Johari 1
Ahmad Fitri Anuar Mahayudin 1
zulhilmi zainol 1
1. uniMAP
Abstract
Keywords
MEMS parallel plate actuator
pull-in voltage
dielectric layer
Manuscript
MEMS parallel plate beam actuator (2).pdf