Events2nd International Electronic Conference on Sensors and Applications
Event submissions
Published
with-doi10.3390/ecsa-2-S1001
This submission belongs to the session C. Physical Sensors of the event 2nd International Electronic Conference on Sensors and Applications
Published date
05 Nov, 2015
Citation
Aldo Ghisi, Ramin Mirzazadeh, Stefano Mariani, Assessment of overetch and polysilicon film properties through on-chip tests, in Proceedings of 2nd International Electronic Conference on Sensors and Applications, 15 November–30 November 2015, MDPI: Basel, Switzerland, doi: 10.3390/ecsa-2-S1001
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Assessment of overetch and polysilicon film properties through on-chip tests

Ramin Mirzazadeh 1
Aldo Ghisi 1
image
Stefano Mariani 1
1. Politecnico di Milano, Dipartimento di Ingegneria Civile e Ambientale, Piazza Leonardo da Vinci 32, 20133 Milano, Italy
Abstract
Keywords
Polysilicon
On-Chip Test
Electro-Mechanical Simulation
Stochastic Morpology