CMOS-Compatible Narrow Bandpass MIM Metamaterial Absorbers for Spectrally Selective LWIR Thermal Sensors

The growing demand for compact, low-power infrared (IR) sensors necessitates advanced solutions for on-chip spectral selectivity, particularly for integration with Thermal Metal-Oxide-Semiconductor (TMOS) devices. This paper investigates the design and analysis of CMOS-compatible metal-insulator-metal (MIM) metamaterial absorbers tailored for selective absorption in the long-wave infrared (LWIR) region. We present a design methodology utilizing an equivalent-circuit model, which provides intuitive physical insight into the absorption mechanism and significantly reduces computational costs compared to full-wave electromagnetic simulations. An important rule in this design methodology is demonstrating how the resonance wavelength of these absorbers can be precisely tuned across the LWIR spectrum by engineering the geometric parameters of the top metallic patterns and, critically, by optimizing the dielectric substrate’s refractive index and thickness, which assist in designing small period MIM absorber units which are important in infrared thermal sensor pixels. Our results demonstrate that the resonance wavelength of these absorbers can be precisely tuned across the LWIR spectrum by engineering the geometric parameters of the top metallic patterns and by optimizing the dielectric substrate’s refractive index and thickness. Specifically, the selection of silicon as the dielectric material, owing to its high refractive index and low losses, facilitates compact designs with high-quality factors. The transmission line model provides intuitive insight into how near-perfect absorption is achieved when the absorber’s input impedance matches the free-space impedance. This work presents a new approach for the methodology of designing MIM absorbers in the mid-infrared and long-wave infrared (LWIR) regions, utilizing the intuitive insights provided by equivalent circuit modeling. This study validates a highly efficient design approach for high-performance, spectrally selective MIM absorbers for LWIR radiation, paving the way for their monolithic integration with TMOS sensors to enable miniaturized, cost-effective, and functionally enhanced IR sensing systems.