This submission belongs to the session 05. Microfabrication and integration of the event The 7th International Multidisciplinary Conference on Optofluidics 2017
Published date
21 Jul, 2017
Citation
Zhiting Peng, Tianzhun WU, <strong>Development of a Roll-to-roll Ultraviolet Imprint Lithography Equipment for Superhydrophobic Film Fabrication</strong>, in Proceedings of The 7th International Multidisciplinary Conference on Optofluidics 2017, Singapore, 25 July–28 July 2017, MDPI: Basel, Switzerland, doi: 10.3390/optofluidics2017-04229
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Development of a Roll-to-roll Ultraviolet Imprint Lithography Equipment for Superhydrophobic Film Fabrication
Zhiting Peng 1
Tianzhun WU 1
1. Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences