EventsThe 7th International Multidisciplinary Conference on Optofluidics 2017
Published
This submission belongs to the session 02. Optical devices and systems of the event The 7th International Multidisciplinary Conference on Optofluidics 2017
Published date
21 Jul, 2017
Citation
Shaonan Zheng, Hong Cai, Aiqun Liu, Yuandong Gu, Integrated High-resolution Photonic Spectrometer, in Proceedings of The 7th International Multidisciplinary Conference on Optofluidics 2017, Singapore, 25 July–28 July 2017, MDPI: Basel, Switzerland, doi: 10.3390/optofluidics2017-04198
Share
Email
Facebook
Twitter
LinkedIn

Integrated High-resolution Photonic Spectrometer

Aiqun Liu 1
Yuandong Gu 2
1. School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore
2. Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02 Innovis Tower, Singapore
Abstract

An integrated high-resolution on-chip spectrometer is designed, fabricated and experimentally tested. A thermally tunable microring resonator is adopted to function as a tunable filter so as to retrieve the input spectrum. The robust integrated spectrometer is quite compact, low cost and CMOS-compatible. It has high potential to be used in on-chip sensing and spectroscopy systems.

Keywords
Microring resonator
tunable filter
Ge-on-Si photodetector
integration
INHOMOGENEOUS LIQUID MEDIUM FOR BIOCHEMICAL SENSING
NEMS Actuator Enhanced by Gradient Optical Force with A Large Range