Event submissions
Published
This submission belongs to the session 16. Lab on a chip of the event The 7th International Multidisciplinary Conference on Optofluidics 2017
Published date
21 Jul, 2017
Citation
Wei Wang, Yaoping Liu, Lingqian Zhang, Parylene MEMS for biomedical applications, in Proceedings of The 7th International Multidisciplinary Conference on Optofluidics 2017, Singapore, 25 July–28 July 2017, MDPI: Basel, Switzerland, doi: 10.3390/optofluidics2017-04531
Share
Email
Facebook
Twitter
LinkedIn
Parylene MEMS for biomedical applications
Wei Wang 1
'%3e%3cpath%20d='M12.6647%2010.9104C12.4176%2010.325%2012.0589%209.7933%2011.6088%209.34485C11.16%208.89511%2010.6283%208.53653%2010.0432%208.28891C10.038%208.28629%2010.0327%208.28498%2010.0275%208.28236C10.8437%207.69282%2011.3743%206.73252%2011.3743%205.64907C11.3743%203.85423%209.92005%202.40002%208.12522%202.40002C6.33038%202.40002%204.87618%203.85423%204.87618%205.64907C4.87618%206.73252%205.40677%207.69282%206.22296%208.28367C6.21772%208.28629%206.21248%208.2876%206.20724%208.29022C5.62031%208.53783%205.09365%208.89287%204.64167%209.34616C4.19192%209.79496%203.83334%2010.3266%203.58573%2010.9117C3.34247%2011.4846%203.21128%2012.0987%203.19925%2012.721C3.1989%2012.735%203.20135%2012.7489%203.20646%2012.7619C3.21157%2012.7749%203.21924%2012.7868%203.22901%2012.7968C3.23877%2012.8068%203.25045%2012.8148%203.26334%2012.8202C3.27623%2012.8256%203.29007%2012.8284%203.30406%2012.8284H4.09012C4.14776%2012.8284%204.19362%2012.7825%204.19493%2012.7262C4.22113%2011.7148%204.62726%2010.7676%205.34519%2010.0497C6.08802%209.30686%207.07452%208.89811%208.12522%208.89811C9.17592%208.89811%2010.1624%209.30686%2010.9052%2010.0497C11.6232%2010.7676%2012.0293%2011.7148%2012.0555%2012.7262C12.0568%2012.7839%2012.1027%2012.8284%2012.1603%2012.8284H12.9464C12.9604%2012.8284%2012.9742%2012.8256%2012.9871%2012.8202C13%2012.8148%2013.0117%2012.8068%2013.0214%2012.7968C13.0312%2012.7868%2013.0389%2012.7749%2013.044%2012.7619C13.0491%2012.7489%2013.0515%2012.735%2013.0512%2012.721C13.0381%2012.0947%2012.9084%2011.4856%2012.6647%2010.9104ZM8.12522%207.90243C7.52388%207.90243%206.95792%207.66793%206.53214%207.24215C6.10636%206.81636%205.87185%206.2504%205.87185%205.64907C5.87185%205.04773%206.10636%204.48177%206.53214%204.05599C6.95792%203.63021%207.52388%203.3957%208.12522%203.3957C8.72655%203.3957%209.29252%203.63021%209.7183%204.05599C10.1441%204.48177%2010.3786%205.04773%2010.3786%205.64907C10.3786%206.2504%2010.1441%206.81636%209.7183%207.24215C9.29252%207.66793%208.72655%207.90243%208.12522%207.90243Z'%20fill='%235D1EE1'/%3e%3c/g%3e%3c/svg%3e)
Yaoping Liu 1
Lingqian Zhang 1
1. Peking University
Abstract
Parylene C is a processable and biocompatible polymer, which has been widely used in the microelectromechanical system (MEMS). Recently, the Parylene MEMS techniques have been implemented in various biomedical microdevices to improve the device performance or to enable unique function. In this talk, we will show our recent achievements in Parylene MEMS, including, high throughput liquid biopsy based on Parylene C micropore array, Parylene C caulked PDMS (pcPDMS) technique, fluorescent pipette enabled by enhanced Parylene C autofluorescence.
Keywords
Optofluidics biosensor based on speckle focusing
Precise Cell Manipulation using High Frequency Surface Acoustic Waves