Event submissions
Published
This submission belongs to the session D. Devices & Energy of the event The 1st International Online Conference on Nanomaterials
Published date
30 Aug, 2018
Citation
Maxim Yu. Maximov, Denis Nazarov, Yury Koshtyal, Anatoly Popovich, ILya Mitrofanov, <span>Atomic layer deposition of Li-Me-O thin films as electrode materials for nanodevices power sources</span><span></span>, in Proceedings of The 1st International Online Conference on Nanomaterials, 1 September–15 September 2018, MDPI: Basel, Switzerland, doi: 10.3390/IOCN_2018-1-05488
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Atomic layer deposition of Li-Me-O thin films as electrode materials for nanodevices power sources
Maxim Yu. Maximov 1
Denis Nazarov 2
'%3e%3cpath%20d='M12.6647%2010.9104C12.4176%2010.325%2012.0589%209.7933%2011.6088%209.34485C11.16%208.89511%2010.6283%208.53653%2010.0432%208.28891C10.038%208.28629%2010.0327%208.28498%2010.0275%208.28236C10.8437%207.69282%2011.3743%206.73252%2011.3743%205.64907C11.3743%203.85423%209.92005%202.40002%208.12522%202.40002C6.33038%202.40002%204.87618%203.85423%204.87618%205.64907C4.87618%206.73252%205.40677%207.69282%206.22296%208.28367C6.21772%208.28629%206.21248%208.2876%206.20724%208.29022C5.62031%208.53783%205.09365%208.89287%204.64167%209.34616C4.19192%209.79496%203.83334%2010.3266%203.58573%2010.9117C3.34247%2011.4846%203.21128%2012.0987%203.19925%2012.721C3.1989%2012.735%203.20135%2012.7489%203.20646%2012.7619C3.21157%2012.7749%203.21924%2012.7868%203.22901%2012.7968C3.23877%2012.8068%203.25045%2012.8148%203.26334%2012.8202C3.27623%2012.8256%203.29007%2012.8284%203.30406%2012.8284H4.09012C4.14776%2012.8284%204.19362%2012.7825%204.19493%2012.7262C4.22113%2011.7148%204.62726%2010.7676%205.34519%2010.0497C6.08802%209.30686%207.07452%208.89811%208.12522%208.89811C9.17592%208.89811%2010.1624%209.30686%2010.9052%2010.0497C11.6232%2010.7676%2012.0293%2011.7148%2012.0555%2012.7262C12.0568%2012.7839%2012.1027%2012.8284%2012.1603%2012.8284H12.9464C12.9604%2012.8284%2012.9742%2012.8256%2012.9871%2012.8202C13%2012.8148%2013.0117%2012.8068%2013.0214%2012.7968C13.0312%2012.7868%2013.0389%2012.7749%2013.044%2012.7619C13.0491%2012.7489%2013.0515%2012.735%2013.0512%2012.721C13.0381%2012.0947%2012.9084%2011.4856%2012.6647%2010.9104ZM8.12522%207.90243C7.52388%207.90243%206.95792%207.66793%206.53214%207.24215C6.10636%206.81636%205.87185%206.2504%205.87185%205.64907C5.87185%205.04773%206.10636%204.48177%206.53214%204.05599C6.95792%203.63021%207.52388%203.3957%208.12522%203.3957C8.72655%203.3957%209.29252%203.63021%209.7183%204.05599C10.1441%204.48177%2010.3786%205.04773%2010.3786%205.64907C10.3786%206.2504%2010.1441%206.81636%209.7183%207.24215C9.29252%207.66793%208.72655%207.90243%208.12522%207.90243Z'%20fill='%235D1EE1'/%3e%3c/g%3e%3c/svg%3e)
Yury Koshtyal 2
ILya Mitrofanov 2
Anatoly Popovich 2
1. Peter the Great Saint Petersburg Polytechnic University, ul. Politekhnicheskaya 29, St.Petersburg, 195251, Russia
2. Peter the Great Saint Petersburg Polytechnic University, ul. Politekhnicheskaya 29, Saint Petersburg, 195251, Russia
Abstract
Keywords
Atomic layer deposition
nanodevices
thin films power sources
lithiated metal oxides