EventsThe Eighteenth International Conference of Experimental Mechanics
Event submissions
Published
with-doi10.3390/ICEM18-05483
This submission belongs to the session ICEM. ICEM 2018 of the event The Eighteenth International Conference of Experimental Mechanics
Published date
28 Aug, 2018
Citation
Shyh-Tsong Lin, Hưng-Xuân Trịnh, Zhe-Wei Chen, Yu-Hsin Lin, 250 Phase-shifting Shearing Interference Microscope with Savart Shear Prism and Rotatable Analyzer, in Proceedings of The Eighteenth International Conference of Experimental Mechanics, Brussels, 1 July–5 July 2018, MDPI: Basel, Switzerland, doi: 10.3390/ICEM18-05483
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250 Phase-shifting Shearing Interference Microscope with Savart Shear Prism and Rotatable Analyzer

Shyh-Tsong Lin 1
Hưng-Xuân Trịnh 2
Zhe-Wei Chen 2
Yu-Hsin Lin 3
1. Department of Electro-optical Engineering, National Taipei University of Technology.
2. Dept. of Opto-electronic Eng., National Taipei University of Technology
3. Shuztung Machinery Industrial Co.,Ltd
Abstract

A phase-shifting shearing interference microscope (PSSIM) is introduced in this paper. It is constructed by placing a Savart shear prism between the objective and sample of a polarizing microscope with a rotatable analyzer as the phase-shifter, and it is capable of determining contour height variation and deformation strain using the principle of shearing interferometry. This paper not only interprets the measurement theory but also presents an experimental setup of the PSSIM. Moreover, this paper exhibits the results from the uses of the setup; the results demonstrate the validity and applicability of the PSSIM.

Keywords
Phase-shifting Shearing interference microscope
Savart shear prism
Rotatable analyzer
Contour height variation
Strain
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