EventsThe 2nd International Online Conference on Nanomaterials
Event submissions
Published
with-doi10.3390/IOCN2020-07938
This submission belongs to the session D. Polymer Nanomaterials, Nanocoatings/Thin films and Nanostructured Surfaces of the event The 2nd International Online Conference on Nanomaterials
Published date
11 Nov, 2020
Citation
Vera Marinova, Dimitre Dimitrov, Dimitrina Petrova, Blagovest Napoleonov, Blagoy Blagoev, Ken Hsu, Shiuan Huei Lin, Jenh Yih Juang, ALD deposited ZnO:Al films on mica for flexible liquid crystal smart devices, in Proceedings of The 2nd International Online Conference on Nanomaterials, 15 November–30 November 2020, MDPI: Basel, Switzerland, doi: 10.3390/IOCN2020-07938
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ALD deposited ZnO:Al films on mica for flexible liquid crystal smart devices

Dimitre Dimitrov 1,2,3
image
Vera Marinova 4
Dimitrina Petrova 5
Blagovest Napoleonov 5
Blagoy Blagoev 6
Ken Hsu 7
Shiuan Huei Lin 3
Jenh Yih Juang 3
1. Institute of Solid State Physics, Bulgarian Academy of Sciences, Sofia, Bulgaria, Bulgaria
2. Institute of Optical Materials and Technologies, Bulgarian Academy of Sciences, Sofia, Bulgaria
3. Department of Electrophysics, National Chiao Tung University, Hsinchu 30010, Taiwan
4. 1 Institute of Optical Materials and Technologies, Bulgarian Academy of Sciences, Sofia, Bulgaria 2 Department of Electrophysics, National Chiao Tung University, Hsinchu 30010, Taiwan
5. 1 Institute of Optical Materials and Technologies, Bulgarian Academy of Sciences, Sofia, Bulgaria 2 South-West Univerity “Neofit Rilski” Blagoevgrad, Bulgaria
6. Institute of Solid State Physics, Bulgarian Academy of Sciences, 1784 Sofia, Bulgaria
7. Department of Photonics, National Chiao Tung University, Hsinchu 30010, Taiwan
Abstract

In this work, high performance conformal Al-doped ZnO (AZO) films are deposited on transparent and flexible muscovite mica substrates by using Atomic Layer Deposition (ALD) technique. AZO/mica films possess high optical transmittance at visible and near-infrared spectral range and retains low electric resistivity, even after continuous bending of up to 800 cycles, confirmed by AFM analysis before and after bending tests. Based on the performed optical and electrical characterizations AZO films are implemented as transparent conductive electrodes in flexible Polymer Dispersed Liquid Crystal (PDLC) smart devices

Keywords
thin films
ALD technique
mica substrate
flexible devices
Manuscript
sciforum-038593-done.pdf
Poster
sciforum-038593_IOCN2020_presentation.pdf
sciforum-038593_IOCN2020_presentation.pdf
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