Event submissions
EventsMicromachines 2021 — 1st International Conference on Micromachines and Applications (ICMA2021)
Published
This submission belongs to the session S1. Micromachines for scientific research of the event Micromachines 2021 — 1st International Conference on Micromachines and Applications (ICMA2021)
Published date
14 Apr, 2021
Citation
Stefano Mariani, Giorgio Casiraghi, Daniele Caltabiano, Andrea Picco, Piezoelectric Ultrasonic Micromotor, in Proceedings of Micromachines 2021 — 1st International Conference on Micromachines and Applications (ICMA2021), 15 April–30 April 2021, MDPI: Basel, Switzerland, doi: 10.3390/Micromachines2021-09560
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Piezoelectric Ultrasonic Micromotor
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Giorgio Casiraghi 1
Daniele Caltabiano 2
Andrea Picco 2
Stefano Mariani 1
1. Politecnico di Milano, Department of Civil and Environmental Engineering
2. STMicroelectronics
Abstract
Keywords
micro electro-mechanical systems
ultrasonic micromotor
piezoelectric micromotor
multiphysics
finite element simulations
Poster
20210416 ICMA21 Piezo Webinar.pdf