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Parametric Analysis of Transduction Mechanisms (Piezoelectric, Electro-Capacitive, and Electromagnetic) in a MEMS Accelerometer.
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1  Department of Mechatronics and Control Engineering, University of Engineering and Technology, Lahore, Pakistan.
Academic Editor: André Furtado

Abstract:

Accelerometers are extensively utilized in various applications to measure vibrations (in the form of acceleration) across different vibrational structures. Researchers have already been exploring different mechanisms to interpret acceleration values. In this regard, over the past decades, Microelectromechanical Systems (MEMS) accelerometers have been prominently describing the interconnectivity between the generated electrical signal and the accelerated motion. However, there has been a major gap in the comparative assessments of the different transduction mechanisms. Therefore, in this research work, a classical dynamics approach is utilized to mathematically model the MEMS accelerometer by incorporating three different designing mechanisms: Piezoelectric, Electro-Capacitive, and Electromagnetic transductions. The transfer functions of all three designs of the MEMS accelerometer are developed by incorporating different structural parameters, material properties, and external input conditions. The piezoelectric accelerometer relies on the inherent compliance of the piezoelectric material, the electric field generated, and the material’s dimensions. The electro-capacitive model’s key parameters include the number of rows of capacitive plates in a comb-like structure, the area of each plate, and the voltage produced by these capacitive elements. On the other hand, the electromagnetic accelerometer depends mainly on the change in flux produced by the magnet in the coil, the coil length, and the magnetic field strength. MATLAB has been utilized to investigate the electrical response of the designed MEMS accelerometers by considering several controllable factors of each modeled system. The tangible findings highlight that under the same environmental as well as external input conditions, the Piezoelectric accelerometer produces the highest output voltage as compared to the electro-capacitive and electromagnetic MEMS accelerometers. Therefore, this article provides a well-established theoretical, mathematical, and semi-numerical interpretation of the MEMS accelerometers for multipurpose engineering applications.

Keywords: Microelectromechanical Systems (MEMS); Accelerometers; Piezoelectric; MATLAB; and Parametric Analysis.
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