Microelectromechanical Systems (MEMS) vibratory gyroscopes are one of the integral inertial sensors of the inertial measurement unit (IMU). The usage of MEMS vibratory gyroscopes as inertial sensors have been risen enormously in many applications, from household to automotive, smartphones to space applications, smart gadgets to military applications, and so on. This paper presents the mathematical modeling and initial development of the starfish structure with C-shaped springs for MEMS vibratory ring gyroscope (VRG). The symmetric design methodology of VRGs corroborates higher sensitivity, mode-matching, good thermal stability, better resolution, and shock resistance in extreme conditions. The proposed VRG has been designed and investigated by using ANSYSTM software. This novel design incorporates two rings structure inner and outer with 16 C-shaped springs. The outer ring radius is 1000 um and the whole VRG structure is supported by outer 8 small square pillars. The gyroscope structure’s wine glass mode driving and sensing resonant frequencies recorded at 51.5 kHz and 52.20 kHz. The mode mismatch between driving and sensing resonant frequency is measured at 0.7 kHz, which is quite low as compared to the other structures of vibratory gyroscopes. The proposed design provides high shock absorption with higher sensitivity for space applications to the controlling and maneuvers of the mini-satellites for space applications.
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Development of starfish shape two rings Microelectromechanical systems (MEMS) vibratory ring gyroscope with C-shaped springs for higher sensitivity.
Published: 01 November 2022 by MDPI in 9th International Electronic Conference on Sensors and Applications session Physical Sensors
Keywords: MEMS, Vibratory Ring Gyroscope, Space applications, Mode-matching, Inertial sensor