An investigation of structural, morphological, and optical properties of post-annealed Cu implanted MgTiO₃ (MTO) thin films has been carried out in the present report. MTO thin films were synthesized in pure Ar atmosphere using RF sputtering. As-deposited samples were annealed at 750°C to induce crystallinity. Subsequently, the crystalline MTO films were implanted with 100 keV Cu ions at a fixed fluence of 3×10¹⁵ ions/cm². Afterward, the implanted samples were annealed at temperatures of 600, 700 and 800°C using Rapid-thermal-annealing (RTA) to alleviate the defects introduced during ion implantation. Crystallinity deteriorates drastically upon implantation, while post-annealing leads to the recrystallization. However, a reduction in crystallinity is further observed at a temperature of 800°C. The impact of RTA treatment on the surface morphology was assessed using Atomic-force-microscopy. Implanted sample exhibits slightly higher transmittance than the pristine film, which gets reduced upon RTA. Bandgap of the pristine film is 4.17 eV which gets reduced to 3.90 eV upon implantation, while post-annealing treatment slightly raises the bandgap, which is an evidence of defects annihilation in the films upon post-annealing treatment. Moreover, the refractive index of implanted MTO film is lesser as compared to pristine and RTA treated samples. MTO thin film exhibits a broad PL emission band extending from near UV to visible region. Quenching in the luminescence is observed upon implantation. Upon annealing the implanted samples at 600 and 700°C, the PL intensity was further reduced. Post annealing at higher temperature of 800°C leads to a substantial increase in emission intensity. Similarly, time-resolved PL indicates a reduction in average decay lifetime of implanted films as compared to the pristine sample, while it is observed to vary with post-annealing treatment. A comprehensive study of recrystallization behavior of RTA treatment of implanted MTO thin films, from structural and optical aspects, was carried out.