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Integrated High-resolution Photonic Spectrometer
1, 2 , 2 , * 1 , 2
1  School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore
2  Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02 Innovis Tower, Singapore


An integrated high-resolution on-chip spectrometer is designed, fabricated and experimentally tested. A thermally tunable microring resonator is adopted to function as a tunable filter so as to retrieve the input spectrum. The robust integrated spectrometer is quite compact, low cost and CMOS-compatible. It has high potential to be used in on-chip sensing and spectroscopy systems.

Keywords: Microring resonator, tunable filter, Ge-on-Si photodetector, integration