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Emerging silicon photonics platforms in China
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1  CETC38


Fabless access to silicon photonics technology is moving silicon photonics closer to becoming a mainstream technology for both of research and industry. Several wafer-scale fabrication platforms have been developed in Europe and America that allow for sub-micron silicon photonic waveguide based circuits, such as imec in Belgium, CEA-Leti in France, IME in Singapore and AIM in America. A new 200mm platform in the Institute of Microelectronics of Chinese Academy of Sciences is introduced. The measurement results of the passive devices, carrier-based modulators and photodiodes are demonstrated, which meet the requirements for 30 Gbps data-communication applications. The other developing CMOS platform compatible for silicon photonics in China are introduced as well.

Keywords: Silicon Photonics Platform