In this paper, we demonstrated several AWG-based silicon photonics devices fabricated with deep UV lithography on SOI platform, including cascaded AWG, AWG-based receiver with fiber-to-waveguide converters, AWG-based OADM and folded AWG with ring-reflectors. In a thin top silicon layer, the silicon nanowire AWG has a performance of relative high crosstalk. In order to reduce the crosstalk, we designed and fabricated a 4-channel cascaded AWG. Compared to the normal single silicon photonics arrayed waveguide grating with a crosstalk of ~ -12.5 dB, the crosstalk of more than 20 dB has been dramatically improved in this cascaded AWG. The AWG-based OADM device is composed of two 1×8 AWGs, MZI thermo-optic switch array and crossing array, by which 8 signals can be loaded or uploaded. The channel spacing is around 3.2 nm at the wavelength of 1550nm and the crosstalk is less than -20 dB. The dynamic extinction is around 15 dB by thermal effect and the power consumption for a single channel is less than 12.3 mW. The 8-channel receiver was designed and fabricated on a SOI wafer with 1µm-thick top silicon layer, which was composed of 5×8 AWG and 8 Ge-based butt-coupled photodetector array. The AWG device was designed on a thick SOI wafer for a good crosstalk performance. However, The silicon waveguide with a height of 1µm has a coupling issue with a cleaved standard optical fiber. In order to reduce the coupling loss with the cleaved fiber, a new cantilevered fiber-to-waveguide converter was designed to integrate at the output/input waveguide of this receiver. The measured coupling loss of this converter is around 2.4dB/facet by using a cleaved single mode fiber. The 3dB-bandwidth of this butt-coupled photodetector is more than 30 GHz at a reverse bias of -1V. The transmission capability of this receiver is more than 400Gbps. Compared to other silicon photonics devices, the AWG size is not small. A 1×4 folded silicon photonics AWG was designed and fabricated on a SOI wafer with 340nm-thick top silicon layer. This folded AWG was integrated with ring-mirrors at the end of arrayed waveguides. The optical signals are launched into the input waveguide and coupled into the arrayed waveguides through the input slab waveguides. At the end of arrayed waveguides, the signals are reflected by the ring-mirrors. The reflected signals go back to the arrayed waveguides and the input slab waveguide in sequence, and then they are separated into the four output waveguides. The measured transmission loss of this folded AWG is about 3.5 dB and the crosstalk is around 20 dB. The measured channel spacing is 6.7 nm. This size of the demonstrated arrayed waveguide grating is only half of the normal arrayed waveguide grating.
Acknowledgment： This work was supported by the National Natural Science Foundation of China (No. 61674072, No. 61565011 and No. 51304097).