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Parylene MEMS for biomedical applications
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1  Peking University


Parylene C is a processable and biocompatible polymer, which has been widely used in the microelectromechanical system (MEMS). Recently, the Parylene MEMS techniques have been implemented in various biomedical microdevices to improve the device performance or to enable unique function. In this talk, we will show our recent achievements in Parylene MEMS, including, high throughput liquid biopsy based on Parylene C micropore array, Parylene C caulked PDMS (pcPDMS) technique, fluorescent pipette enabled by enhanced Parylene C autofluorescence.