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Parylene MEMS for biomedical applications
Published:
21 July 2017
by MDPI
in The 7th International Multidisciplinary Conference on Optofluidics 2017
session Lab on a chip
Abstract:
Parylene C is a processable and biocompatible polymer, which has been widely used in the microelectromechanical system (MEMS). Recently, the Parylene MEMS techniques have been implemented in various biomedical microdevices to improve the device performance or to enable unique function. In this talk, we will show our recent achievements in Parylene MEMS, including, high throughput liquid biopsy based on Parylene C micropore array, Parylene C caulked PDMS (pcPDMS) technique, fluorescent pipette enabled by enhanced Parylene C autofluorescence.