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2nd International Electronic Conference on Sensors and Applications

S1: MEMS and NEMS


Section Chairs:
Dr. Stefano Mariani, Department of Civil and Environmental Engineering, Politecnico di Milano, Italy and Dr. Marco de Fazio, STMicroelectronics, Genève, Switzerland

The MEMS and NEMS Section is aimed at gathering together contributions on the modelling and analysis of Micro-Electro-Mechanical-Systems (MEMS) and Nano-Electro-Mechanical-Systems (NEMS), and on their real-life applications. Works on the theoretical, numerical and experimental aspects are solicited, especially those stemming from multi-disciplinary approaches.

Contributions are welcome to address the following topics:

  • Multi-physics modeling
  • Uncertainty quantification at the micro- and nano-scale
  • System identification and control
  • Sensor optimization
  • Damping phenomena
  • Stiction and other contact or proximity phenomena
  • Effect of emerging materials, like graphene

Applications to be considered include, but are not limited to:

  • Inertial sensors
  • Physical sensors
  • Chemical sensors
  • RF switches
  • Micromirrors
  • Energy harvesters
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