Microelectromechanical systems (MEMS) are nowadays widespread in the sensor market with a number of different applications. New production techniques and ever smaller device geometries require a continuous investigation of potential failure mechanisms in such devices. This work presents an experimental on-chip setup to assess the geometry- and material-dependent strength of stoppers adopted to limit the deformation of movable parts, using an electrostatically actuated device. A series of comb-fingers and parallel plates are used to provide a rather large stoke to a shuttle, connected to the anchors through flexible springs. Upon application of a varying voltage, failure of stoppers of variable size is observed and confirmed by postmortem ΔC-V curves. Results of an experimental campaign are collected to infer the stochastic property of the strength of polycrystalline, columnar silicon films.
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On-chip tests for the characterization of the mechanical strength of polysilicon
Published: 01 November 2022 by MDPI in 9th International Electronic Conference on Sensors and Applications session Physical Sensors
Keywords: polysilicon tensile strength; polysilicon thin films; on-chip mechanical testing