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Simulation based Design and Analysis for MEMS Vibrating Ring Gyroscope
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1  Curtin University
Academic Editor: Ana Paula Betencourt Martins Amaro

Abstract:

Microelectromechanical systems (MEMS) inertial sensors are integral components of a variety of smart electronic devices, most notably MEMS vibrating gyroscopes, which are rotational inertial sensors. The applications of MEMS vibrating gyroscopes range from household appliances to GPS, and even to military applications. However, the stability and reliability of these MEMS inertial sensors in space applications still pose challenges. In this research study, we introduce a simple design for a vibrating ring gyroscope with eight S-shaped support springs connected to a centrally placed anchor. The symmetric design structure with S-shaped support springs provides higher sensitivity while minimizing mode mismatch. The design and modelling analysis of the vibrating ring gyroscope was conducted using ANSYS software. The proposed vibrating ring gyroscope has a ring radius of 1000 µm, an 80 µm arc radius for the support springs, ring and support spring thicknesses of 10 µm, and a 190 µm radius for the centrally placed anchor. The vibrating ring gyroscope operates at two identical wine glass resonant modes, one for driving resonance frequency and the other for sensing resonance frequency. Both simulated resonance frequencies were measured at 26.27 kHz and 26.31 kHz. The modelled result achieved a mode mismatch of 40 Hz, which can be easily rectified with tuning electrodes.

Keywords: MEMS, Vibrating Ring Gyroscope, Space applications, Inertial sensor, IMU, sensor
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