Micro-electro-magnetic Vibration Energy Harvesters: Analysis and Comparative Assessment

Abstract

The development of micro-electromagnetic vibration energy harvesters (MEMVEHs) plays a crucial role in advancing self-powered nanophotonic, nanoelectronic, and nanosensor systems. As energy autonomy becomes critical for miniaturized devices, MEMVEHs offer a sustainable power source for low-power nanodevices operating in wireless sensor networks, wearable electronics, and biomedical implants. This study provides a comparative assessment of MEMVEH technologies and evaluates their integration potential within next-generation nanoscale systems, enabling enhanced performance, longevity, and energy efficiency of emerging nanotechnologies.
Electromagnetic vibration energy harvesters (EMEHs) based on microelectromechanical systems (MEMS) technology are promising solutions for powering small-scale, autonomous electronic devices. In this study, two electromagnetic vibration energy harvesters based on microelectromechanical (MEMS) technology are presented. Two models with distinct vibration structures were designed and fabricated . A permanent magnet is connected to a silicon vibration structure (resonator) and a tiny wire-wound coil as part of the energy harvester. The coil has a total volume of roughly 0.8 cm3. Two energy harvesters with various resonators are tested and compared.
Model A's maximum load voltage is 163 mV, whereas Model B's is 208 mV. A maximum load power of 59.52 μW was produced by Model A at 347 Hz across a 405 Ω load. At 311.4 Hz, Model B produced a maximum load power of 149.13 μW while accelerating by 0.4 g. Model B features a larger working bandwidth and a higher output voltage than Model A. Model B performs better than Model A in comparable experimental settings. Simple study revealed that Model B's electromagnetic energy harvesting produced superior outcomes. Additionally, it indicates that a non-linear spring may be able to raise the output voltage and widen the frequency bandwidth.

Keywords

Electromagnetic, Energy, Harvester, MEMS, Model, Load, Resonators, Voltage, Frequency, Bandwidth.