This paper presents the modeling and simulation of a multilayer surface acoustic wave (SAW) resonator designed to operate at a center frequency of 30 GHz. The proposed structure consists of a layered stack of silicon (Si), aluminum nitride (AlN), silicon dioxide (SiO₂), and lithium niobate (LiNbO₃), with gold (Au) interdigitated transducer (IDT) electrodes placed on the top surface. This multilayer configuration enhances surface wave confinement and piezoelectric efficiency while maintaining compatibility with silicon-based integration platforms. A two-dimensional finite element model is developed in COMSOL Multiphysics, incorporating the elastic and dielectric properties of each material. The IDT electrodes are modeled as terminals, with a 1 V excitation applied to one electrode and the other grounded. A frequency-domain sweep is performed over the range of 28 GHz to 32 GHz to extract key performance indicators such as the input impedance (Zin) and the S11 reflection coefficient. Simulation results confirm the presence of a Rayleigh-type SAW, tightly confined near the surface of the LiNbO₃ layer. The primary resonance is observed at 29.57 GHz, which aligns well with the designed acoustic wavelength. This work demonstrates the effectiveness of multilayer SAW resonators for future MEMS, RF filtering, and acoustic sensing applications at the nanoscale, with high frequency selectivity and integration potential.
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Modeling of a High-Frequency SAW Resonator on Si/AlN/SiO₂/LiNbO₃ Multilayer Substrate
Published:
20 March 2026
by MDPI
in The 1st International Online Conference on Optics
session Geometrical Optics
Abstract:
Keywords: high-frequency RF;COMSOL Multiohysics ;SAW Resonator
