The titanium nitride–aluminum oxide–hafnium oxide–silicon oxide–silicon device with aluminum oxide as charge-blocking layer (hereafter TAHOS) could be a candidate for nonvolatile total ionization dose (TID) radiation sensor. In this paper, gamma radiation induces a significant decrease in the threshold voltage VT of TAHOS and the radiation-induced VT decrease on TAHOS is nearly 1.3 times of that on a standard titanium nitride–silicon oxide–hafnium oxide–silicon oxide–silicon (hereafter TOHOS) device after 5 Mrad TID gamma irradiation. The change in VT of TAHOS after gamma irradiation also has a strong correlation to TID up to 5 Mrad gamma irradiation. The VT retention characteristics of TAHOS devices can be improved before and after gamma irradiation. Moreover, the VT retention characteristic of TAHOS device can be markedly improved and is nearly 13% better than that of a standard TOHOS device after 5 Mrad gamma irradiation. Therefore, the TAHOS device in this study has demonstrated the possibility using TAHOS for high TID response and good TID data retention for non-volatile TID radiation sensing.
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Performance of TAHOS Device as Nonvolatile TID Radiation Sensor
Published: 14 November 2016 by MDPI in 3rd International Electronic Conference on Sensors and Applications session Physical Sensors
Keywords: high k; sensor; radiation; SONOS; SOHOS; MOS; TID