This talk will give a systematic study for the ultra-precision machining technology for generating various optical microstructures, such as micro V-groove for optical fiber connectors, microlens array for microfluidic microcavity, etc. which includes the machining mechanism, tool path generation, modeling and simulation of surface generation, machining error prediction, process optimization, etc. A series of methods and approaches are also presented to measure and characterize such optical microstructures. The research work aims to provide an enabling solution for producing optical microstructures in high precision and efficiently.