Finite Element Method (FEM) simulations offer a powerful tool for investigating the process of dielectrophoresis (DEP) to deposit single-walled carbon nanotubes (SWCNTs) on a silicon/silicon dioxide substrate using interdigitated gold electrodes. This study focuses on the precise control and manipulation of SWCNTs by applying the non-uniform electric fields generated by these electrodes. Using FEM, we simulate the electric field distribution and the resulting dielectrophoretic forces that influence SWCNT alignment and deposition. The simulations provide detailed insights into the DEP process's parameters, including electrode geometry, voltage magnitude, frequency of the applied AC field, and the properties of the SWCNTs and substrate. Our results demonstrate the effective deposition of SWCNTs, forming well-defined patterns on the silicon/silicon dioxide substrate. The SWCNTs exhibit unique electrical, mechanical, and thermal properties that make them highly desirable for a wide range of applications. This technique offers significant advantages in terms of precision, reproducibility, and scalability for fabricating nanoscale devices. This research contributes to advancements in nanotechnology applications such as sensors, transistors, and other electronic components by providing a detailed understanding of the DEP mechanism for SWCNTs. The potential for integrating SWCNTs into various electronic and optoelectronic devices is significantly enhanced by these findings, paving the way for future innovations in the field.