ALD deposited ZnO:Al films on mica for flexible liquid crystal smart devices

¹ Institute of Solid State Physics, Bulgarian Academy of Sciences, Sofia, Bulgaria, Bulgaria
² Institute of Optical Materials and Technologies, Bulgarian Academy of Sciences, Sofia, Bulgaria
³ Department of Electrophysics, National Chiao Tung University, Hsinchu 30010, Taiwan
⁴ 1 Institute of Optical Materials and Technologies, Bulgarian Academy of Sciences, Sofia, Bulgaria 2 Department of Electrophysics, National Chiao Tung University, Hsinchu 30010, Taiwan
⁵ 1 Institute of Optical Materials and Technologies, Bulgarian Academy of Sciences, Sofia, Bulgaria 2 South-West Univerity “Neofit Rilski” Blagoevgrad, Bulgaria
⁶ Institute of Solid State Physics, Bulgarian Academy of Sciences, 1784 Sofia, Bulgaria
⁷ Department of Photonics, National Chiao Tung University, Hsinchu 30010, Taiwan

Published: 11 November 2020 by MDPI in 2nd International Online-Conference on Nanomaterials session Polymer Nanomaterials, Nanocoatings/Thin films and Nanostructured Surfaces

https://doi.org/10.3390/IOCN2020-07938

Abstract:

In this work, high performance conformal Al-doped ZnO (AZO) films are deposited on transparent and flexible muscovite mica substrates by using Atomic Layer Deposition (ALD) technique. AZO/mica films possess high optical transmittance at visible and near-infrared spectral range and retains low electric resistivity, even after continuous bending of up to 800 cycles, confirmed by AFM analysis before and after bending tests. Based on the performed optical and electrical characterizations AZO films are implemented as transparent conductive electrodes in flexible Polymer Dispersed Liquid Crystal (PDLC) smart devices

Keywords: thin films, ALD technique, mica substrate, flexible devices

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