Nowadays the development of nanoscale power sources with a long battery life is required for novel nanoelectronic devices, such as wireless sensors, biomedical implants, smart cards and others. Lithiated metal oxides (Li-Me-O) are widely used in Lithium-ion batteries (LIBs). Depending on the type of metal Li-Me-O can be applied as cathode, anode or electrolyte materials. Atomic layer deposition (ALD) is an excellent method for synthesis of a different type of thin films LIBs materials due to its precision control over thickness, purity, and uniformity over large areas. In this study, Li-Sn-O and Li-Al-O thin films were synthesized by ALD as the anodes and solid-state electrolyte materials for thin films power sources. It was shown that prepared thin film anodes demonstrate exceptional cyclability at a fast discharge rate. Specific capacity decrease at the increase of discharge rate up to 40 times is less than 20 %. The present work reports results of films investigation with the use of spectral ellipsometry, X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy, and time-of-flight secondary ion mass spectrometry.

This research was supported by the Russian Science Foundation grant (project No 18-73-10015).