Cite
Vicentini Ferreira do Valle, T.; Ghisi, A.; Mariani, S.; Gattere, G.; Rizzini, F.; Falorni, L.; Guerinoni, L. On-chip tests for the characterization of the mechanical strength of polysilicon, in Proceedings of the 9th International Electronic Conference on Sensors and Applications, 1–15 November 2022, MDPI: Basel, Switzerland, doi:10.3390/ecsa-9-13363