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Design of a Fabry-Perot interferometer based on silicon wafer for dielectric gas sensing applications
Marco Estrada, Eloisa Gallegos-Arellano, 1 J. M. Sierra-Hernandez, 2 D. Jauregui-Vazquez, 2 H. Ramirez-Gasca, 1 H. J. Estrada, J. M. Estudillo-Ayala, 2 F. Salazar-Villanueva, 1 Roberto Rojas-Laguna 2
1  Univ. Tecnol√≥gica de Salamanca (Mexico)
2  Univ. de Guanajuato (Mexico)

Published: 13 November 2018 by SPIE-Intl Soc Optical Eng in Infrared Sensors, Devices, and Applications VIII
SPIE-Intl Soc Optical Eng, Volume 10766; 10.1117/12.2320598
Keywords: absorption, Gas, silicon wafer, Thickness, interferometer, Fabry, FPI, Perot
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