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Laser Scanning Confocal Thermoreflectance Microscope for the Backside Thermal Imaging of Microelectronic Devices
Dong Uk Kim, Chan Bae Jeong, Jung Dae Kim, Kye-Sung Lee, Hwan Hur, Ki-Hwan Nam, Geon Hee Kim, Ki Soo Chang

Published: 30 November 2017 by MDPI in Sensors
MDPI, Volume 17; 10.3390/s17122774
Abstract: In this paper, we report on a confocal thermoreflectance imaging system that can examine the thermal characteristics of microelectronic devices by penetrating the backside of a device through the substrate. In this system, the local reflectivity variations due to heat generation in the device are measured point by point by a laser scanning confocal microscope capable of eliminating out-of-focus reflections and the thermoreflectance is extracted via Fourier-domain signal processing. In comparison to the conventional widefield thermoreflectance microscope, the proposed laser scanning confocal thermoreflectance microscope improves the thermoreflectance sensitivity by ~23 times and the spatial resolution by ~25% in backside thermoreflectance measurements.
Keywords: confocal microscopy, reflection, thermal imaging
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