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Dong Uk Kim   Dr.  Other 
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Dong Uk Kim published an article in November 2017.
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Kye-Sung Lee

14 shared publications

Division of Scientific Instrumentation, Korea Basic Science Institute, Daejeon 34133, South Korea

Hwan Hur

10 shared publications

Division of Scientific Instrumentation, Korea Basic Science Institute, Daejeon 34133, South Korea

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Article 0 Reads 0 Citations Laser Scanning Confocal Thermoreflectance Microscope for the Backside Thermal Imaging of Microelectronic Devices Dong Uk Kim, Chan Bae Jeong, Jung Dae Kim, Kye-Sung Lee, Hwa... Published: 30 November 2017
Sensors, doi: 10.3390/s17122774
DOI See at publisher website PubMed View at PubMed ABS Show/hide abstract
In this paper, we report on a confocal thermoreflectance imaging system that can examine the thermal characteristics of microelectronic devices by penetrating the backside of a device through the substrate. In this system, the local reflectivity variations due to heat generation in the device are measured point by point by a laser scanning confocal microscope capable of eliminating out-of-focus reflections and the thermoreflectance is extracted via Fourier-domain signal processing. In comparison to the conventional widefield thermoreflectance microscope, the proposed laser scanning confocal thermoreflectance microscope improves the thermoreflectance sensitivity by ~23 times and the spatial resolution by ~25% in backside thermoreflectance measurements.
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