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Emilie Courjon  - - - 
Top co-authors See all
Pascal Nicolay

7 shared publications

Carinthian Tech Research (CTR AG), Europastrasse 12, 9524 Villach, Austria;(H.C.);(G.B.);(C.G.)

Sylvain Ballandras

7 shared publications

2frec|n|sys, TEMIS Innovation, 18 Rue Alain Savary, 25000 Besançon, France;(S.B.);(E.C.)

Hugo Chambon

5 shared publications

Carinthian Tech Research AG, Villach, AUSTRIA

Christian Gruber

2 shared publications

Carinthian Tech Research (CTR AG), Europastrasse 12, 9524 Villach, Austria;(H.C.);(G.B.);(C.G.)

Gudrun Bruckner

2 shared publications

Carinthian Tech Research (CTR AG), Europastrasse 12, 9524 Villach, Austria;(H.C.);(G.B.);(C.G.)

8
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Distribution of Articles published per year 
(2008 - 2018)
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7
 
Publications See all
Article 1 Read 0 Citations A LN/Si-Based SAW Pressure Sensor Pascal Nicolay, Hugo Chambon, Gudrun Bruckner, Christian Gru... Published: 16 October 2018
Sensors, doi: 10.3390/s18103482
DOI See at publisher website PubMed View at PubMed ABS Show/hide abstract
Surface Acoustic Wave (SAW) sensors are small, passive and wireless devices. We present here the latest results obtained in a project aimed at developing a SAW-based implantable pressure sensor, equipped with a well-defined, 30 μm-thick, 4.7 mm-in-diameter, Lithium Niobate (LN) membrane. A novel fabrication process was used to solve the issue of accurate membrane etching in LN. LN/Si wafers were fabricated first, using wafer-bonding techniques. Grinding/polishing operations followed, to reduce the LN thickness to 30 μm. 2.45 GHz SAW Reflective Delay-Lines (R-DL) were then deposited on LN, using a combination of e-beam and optical lithography. The R-DL was designed in such a way as to allow for easy temperature compensation. Eventually, the membranes were etched in Si. A dedicated set-up was implemented, to characterize the sensors versus pressure and temperature. The achieved pressure accuracy is satisfactory (±0.56 mbar). However, discontinuities in the response curve and residual temperature sensitivity were observed. Further experiments, modeling and simulations were used to analyze the observed phenomena. They were shown to arise essentially from the presence of growing thermo-mechanical strain and stress fields, generated in the bimorph-like LN/Si structure, when the temperature changes. In particular, buckling effects explain the discontinuities, observed around 43 °C, in the response curves. Possible solutions are suggested and discussed.
PROCEEDINGS-ARTICLE 0 Reads 0 Citations High overtone bulk acoustic resonators for high temperature sensing applications Emilie Courjon, Bruno Francois, Gilles Martin, William Dania... Published: 01 July 2013
2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC), doi: 10.1109/eftf-ifc.2013.6702287
DOI See at publisher website
PROCEEDINGS-ARTICLE 0 Reads 0 Citations New microfabrication method to invert micrometric ferroelectric domains on lithium niobate wafers for RF applications F. Bassignot, Emilie Courjon, F. Henrot, T. Baron, S. Ballan... Published: 01 July 2013
2013 Joint IEEE Int'l Symp on Applications of Ferroelectrics & Workshop on Piezoresponse Force Microscopy (ISAF/PFM), doi: 10.1109/isaf.2013.6748681
DOI See at publisher website
BOOK-CHAPTER 0 Reads 0 Citations Periodically Poled Acoustic Wave-Guide and Transducers for Radio-Frequency Applications Sylvain Ballandras, Emilie Courjon, Florent Bassignot, Gwenn... Published: 23 August 2011
Ferroelectrics - Applications, doi: 10.5772/18584
DOI See at publisher website
Article 0 Reads 0 Citations Notice of Removal Prediction and measurement of boundary waves at the interface between LiNbO3 and silicon Dorian Gachon, William Daniau, Emilie Courjon, Vincent Laude... Published: 01 July 2010
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, doi: 10.1109/tuffc.2010.1596
DOI See at publisher website PubMed View at PubMed
PROCEEDINGS-ARTICLE 0 Reads 0 Citations Frequency sources and filters applications using high overtone bulk acoustic resonators exhibiting high Q.f product Dorian Gachon, Jeremy Masson, Emilie Courjon, Yannick Gruson... Published: 01 May 2008
2008 IEEE International Frequency Control Symposium, doi: 10.1109/freq.2008.4623106
DOI See at publisher website
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