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Emilie Courjon  - - - 
Top co-authors See all
Sylvain Ballandras

12 shared publications

Frec|n|sys, Temis Innovation, 18 rue Alain Savary, 25000 Besançon, France

Hugo Chambon

5 shared publications

Carinthian Tech Research (CTR AG), Europastrasse 12, 9524 Villach, Austria

Pascal Nicolay

5 shared publications

Carinthian Tech Research (CTR AG), Europastrasse 12, 9524 Villach, Austria

Christian Gruber

2 shared publications

Carinthian Tech Research (CTR AG), Europastrasse 12, 9524 Villach, Austria

Gudrun Bruckner

2 shared publications

Carinthian Tech Research (CTR AG), Europastrasse 12, 9524 Villach, Austria

13
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Distribution of Articles published per year 
(2008 - 2018)
Total number of journals
published in
 
10
 
Publications See all
Article 1 Read 0 Citations A LN/Si-Based SAW Pressure Sensor Pascal Nicolay, Hugo Chambon, Gudrun Bruckner, Christian Gru... Published: 16 October 2018
Sensors, doi: 10.3390/s18103482
DOI See at publisher website ABS Show/hide abstract
Surface Acoustic Wave (SAW) sensors are small, passive and wireless devices. We present here the latest results obtained in a project aimed at developing a SAW-based implantable pressure sensor, equipped with a well-defined, 30 μm-thick, 4.7 mm-in-diameter, Lithium Niobate (LN) membrane. A novel fabrication process was used to solve the issue of accurate membrane etching in LN. LN/Si wafers were fabricated first, using wafer-bonding techniques. Grinding/polishing operations followed, to reduce the LN thickness to 30 μm. 2.45 GHz SAW Reflective Delay-Lines (R-DL) were then deposited on LN, using a combination of e-beam and optical lithography. The R-DL was designed in such a way as to allow for easy temperature compensation. Eventually, the membranes were etched in Si. A dedicated set-up was implemented, to characterize the sensors versus pressure and temperature. The achieved pressure accuracy is satisfactory (±0.56 mbar). However, discontinuities in the response curve and residual temperature sensitivity were observed. Further experiments, modeling and simulations were used to analyze the observed phenomena. They were shown to arise essentially from the presence of growing thermo-mechanical strain and stress fields, generated in the bimorph-like LN/Si structure, when the temperature changes. In particular, buckling effects explain the discontinuities, observed around 43 °C, in the response curves. Possible solutions are suggested and discussed.
PROCEEDINGS-ARTICLE 0 Reads 0 Citations Oriented Single-Crystal LiTaO3 Thin Film on Silicon for High Performances SAW Components Marie Gorisse, Alexis Drouin, Yann Sinquin, Isabelle Huyet, ... Published: 01 October 2018
2018 IEEE International Ultrasonics Symposium (IUS), doi: 10.1109/ultsym.2018.8579660
DOI See at publisher website
Conference 0 Reads 0 Citations Leaky SAW with reduced TCF on LT42/Silicon substrates Haixia Wang, Thomas Baron, Gilles Martin, William Daniau, Ma... Published: 01 June 2014
2014 European Frequency and Time Forum (EFTF), doi: 10.1109/eftf.2014.7331485
DOI See at publisher website
Conference 0 Reads 0 Citations A comprehensive model of the electrical response of SAW devices submitted to thermal perturbation Thierry Laroche, Julien Garcia, Emilie Courjon, Sylvain Ball... Published: 01 June 2014
2014 European Frequency and Time Forum (EFTF), doi: 10.1109/eftf.2014.7331429
DOI See at publisher website
PROCEEDINGS-ARTICLE 0 Reads 0 Citations New microfabrication method to invert micrometric ferroelectric domains on lithium niobate wafers for RF applications F. Bassignot, Emilie Courjon, F. Henrot, T. Baron, S. Ballan... Published: 01 July 2013
2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy (ISAF/PFM), doi: 10.1109/isaf.2013.6748681
DOI See at publisher website
PROCEEDINGS-ARTICLE 0 Reads 0 Citations High overtone bulk acoustic resonators for high temperature sensing applications Emilie Courjon, Bruno Francois, Gilles Martin, William Dania... Published: 01 July 2013
2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC), doi: 10.1109/eftf-ifc.2013.6702287
DOI See at publisher website
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